Proceedings of the 3rd Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments, Octber 9-10, 2002, Hotel Yumoto Fujiya, Hakone, Japan

著者

• Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
• 日本学術振興会 ニホン ガクジュツ シンコウカイ
• Hanʾguk Kwahak Chaedan

書誌事項

Proceedings of the 3rd Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments, Octber 9-10, 2002, Hotel Yumoto Fujiya, Hakone, Japan

sponsored by JSPS and KOSEF

[JSPS], 2002

• NII書誌ID(NCID): BA88689848
• 出版国コード: ja
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: [s.l.]
• ページ数/冊数: 306 p.
• 大きさ: 30 cm