Proceedings of 2001 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments, June 20-June 23, 2001, Cheju Seogwipo KAL Hotel, Cheju Island, Korea

Author(s)

• Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
• Korea University of Technology and Education
• 豊橋技術科学大学 トヨハシ ギジュツ カガク ダイガク

Bibliographic Information

Proceedings of 2001 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments, June 20-June 23, 2001, Cheju Seogwipo KAL Hotel, Cheju Island, Korea

sponsored by KOSEF and JSPS

Korea University of Technology and Education , Toyohashi University of Technology, 2001

• NCID: BA88690916
• Country Code: ko
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Korea],[Toyohashi]
• Pages/Volumes: 328 p.
• Size: 30 cm