Thermal transport for applications in micro/nanomachining

Author(s)

    • Wong, B. T. (Basil T.)
    • Mengüç, M. Pinar

Bibliographic Information

Thermal transport for applications in micro/nanomachining

B.T. Wong, M.P. Mengüç

(Microtechnology and MEMS)

Springer, c2008

Other Title

Thermal transport for applications in nanomachining

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Note

Cover title: Thermal transport for applications in nanomachining

Includes bibliographical references (p. [221]-228) and index

Description and Table of Contents

Description

Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transport at the nanoscale and details simulations of different processes relevant to nanomachining. The final chapter summarizes the important points and discusses directions for future work to improve the modeling of nanomachining.

Table of Contents

Transport Equations.- Modeling of Transport Equations via MC Methods.- Modeling of e-Beam Transport.- Thermal Conduction Coupled with e-Beam Transport.- Two-Temperature Model Coupled with e-Beam Transport.- Thermal Conduction with Electron Flow/Ballistic Behavior.- Parallel Computations for Two-Temperature Model.- Molecular Dynamics Simulations.- Concluding Remarks.

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