Handbook of optical metrology : principles and applications

著者

• 吉澤, 徹 ヨシザワ, トオル

書誌事項

Handbook of optical metrology : principles and applications

edited by Toru Yoshizawa

CRC, c2009

• : hbk.

注記

Includes bibliographical references and index

内容説明・目次

内容説明

The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals. Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications. With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.

目次

Fundamentals of Optical Elements and Devices Light Sources Natalia Dushkina Lenses, Prisms, and Mirrors Peter R. Hall Optoelectronic Sensors Motohiro Suyama Optical Devices and Optomechanical Elements Akihiko Chaki and Kenji Magara Fundamentals of Principles and Techniques for Metrology Propagation of Light Natalia Dushkina Interferometry David A. Page Holography Giancarlo Pedrini Speckle Methods and Applications Nandigana Krishna Mohan Moire Metrology Lianhua Jin Optical Heterodyne Measurement Method Masao Hirano Diffraction Toru Yoshizawa Light Scattering Lev T. Perelman Polarization Michael Shribak Near-Field Optics Wenhao Huang, Xi Li, and Guoyong Zhang Length and Size Rene Schoedel Practical Applications Displacement Akiko Hirai, Mariko Kajima, and Souichi Telada Straightness and Alignment Ruedi Thalmann Flatness Toshiyuki Takatsuji and Youichi Bitou Surface Profi lometry Toru Yoshizawa and Toshitaka Wakayama Three-Dimensional Shape Measurement Frank Chen, Gordon M. Brown, and Mumin Song Fringe Analysis Jun-ichi Kato Photogrammetry Nobuo Kochi Optical Methods in Solid Mechanics Anand Asundi Optical Methods in Flow Measurement Sang Joon Lee Polarimetry Baoliang Wang Birefringence Measurement Yukitoshi Otani Ellipsometry Hiroyuki Fujiwara Optical Thin Film and Coatings Cheng-Chung Lee and Shigetaro Ogura Film Surface and Thickness Profi lometry Katsuichi Kitagawa On-Machine Measurements Takashi Nomura and Kazuhide Kamiya

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詳細情報

• NII書誌ID(NCID): BA89341719
• ISBN:
  • 9780849337604
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Boca Raton, Fla
• ページ数/冊数: xiii, 730 p.
• 大きさ: 26 cm
• 分類:
  • DC22 : 681.25
• 件名:
  • LCSH : Optical measurements
  • LCSH : Metrology