Semiconductor manufacturing technology

Author(s)

• Yoo, Chue San

Bibliographic Information

Semiconductor manufacturing technology

Chue San Yoo

（Advanced series in electrical and computer engineering, v. 13）

World Scientific, c2008

Note

Includes bibliographical references (p. 453-464) and index

Details

• NCID: BA90114190
• ISBN:
  • 9789812568236
• LCCN: 2008299033
• Country Code: si
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Singapore
• Pages/Volumes: xii, 470 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC22 : 621.38152
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Semiconductor industry
• Parent Bibliography ID:
  • BA07409286