Defects in microelectronic materials and devices

Author(s)

• Fleetwood, D. M. (Dan M.)
• Pantelides, Sokrates T.
• Schrimpf, Ronald D

Bibliographic Information

Defects in microelectronic materials and devices

edited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf

CRC Press, c2009

Note

Includes bibliographical references and index

Details

• NCID: BA90642665
• ISBN:
  • 9781420043761
• LCCN: 2008018722
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton
• Pages/Volumes: xvi, 753 p.
• Size: 26 cm
• Classification:
  • LCC : TK7871
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Materials -- Testing
  • LCSH : Metal oxide semiconductor field-effect transistors -- Testing
  • LCSH : Integrated circuits -- Defects