Interlayer dielectrics for semiconductor technologies

Author(s)

• Murarka, S. P.
• Eizenberg, M.
• Sinha, A. K.

Bibliographic Information

Interlayer dielectrics for semiconductor technologies

edited by S.P. Murarka, M. Eizenberg, A.K. Sinha

Elsevier/Academic Press, c2003

Note

Includes bibliographical references (p.425-[427]) and index

Details

• NCID: BA90698659
• ISBN:
  • 9780125112215
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam ; Boston
• Pages/Volumes: xiv, 444 p.
• Size: 25 cm
• Classification:
  • LCC : TK7871.85
• Subject Headings:
  • LCSH : Semiconductor wafers
  • LCSH : Dielectrics