NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July 2009, Singapore
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書誌事項
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July 2009, Singapore
（Advanced materials research, 74）
Trans Tech Publications, c2009
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注記
Includes bibliographical references and index
A special issue of the conference proceedings for symposium L of ICMAT 2009
内容説明・目次
内容説明
Volume is indexed by Thomson Reuters CPCI-S (WoS).
This second book on the subject of MEMS covers contemporary topics of importance to science, engineering and the technology of materials.
目次
Preface
Section 1: Nanodevice
S3 Micromachine as Multi-Scale Interface for BME
Flexible Micro-Structured Mold for UV Micro-Casting of Polymeric Microdevices
Section 2: NEMS/MEMS Modeling & Simulation
Plasmonics NanoSensor
Light-Driven Acoustic Band Gap Based on Metal Nanospheres
A Continuum Theory for Simulation of Ionic-Strength-Sensitive Hydrogel for BioMEMS Application
A Transient Simulation for Analysis of Volume Transition of pH-Sensitive Hydrogel in Micro-Channel
Analysis of Microelectromechanical Systems Using the Meshless Random Differential Quadrature Method
Mathematical Modeling of Hydrogels for Microfluidic Flow Control
Section 3: Photonics I
All-Optical Signal Processing Based on Nonlinear Effects in Semiconductor Optical Amplifiers
Photothermal Imaging (PTI) System for the Imaging of Gold Nano-Particles and Cellular Organelles
Section 4: Photonics II
The Design and Fabrication of Poly(dimethylsiloxane) Single Mode Rib Waveguides for Lab-on-a-Chip Applications
Analysis of Novel Building Blocks for Photonic MEMS Based on Deep 1D Photonic Crystals
A THz-Wave Generator Based on MEMS Technology
A Photonic MEMS Polarization Switch
Dynamic Liquid Optical Splitters and Interferometers Integrated into Micro-Fluidic-Systems
Section 5: Microfluidics
Flows in Microchannels and Cavities - Visco-Elasticity, Faradaic Charging and Surface Roughness Effects
Mixing Enhancement of a Passive Micromixer by Applying Boundary Protrusion Structures
Design and Characterization of a MEMS-Microfluidic Sensor for Rheological Applications
Development of Liquid Tunable Diffractive/Refractive Hybrid Lens Based on Combination of Diamond Turning and Soft Lithography
Section 6: Biosensors
A Chip-Level Disposable Optofluidic Device for Biosensing
Label-Free Protein Detection via Gold Nanoparticles and Localized Surface Plasmon Resonance
Section 7: NEMS/MEMS for Bio-Applications I
Photothermal Techniques for Materials Characterization and Live Cells Monitoring
Gas Bubble Sizes Formed in Liquids at Different Resonant Frequencies
DC-Biased AC-Electrokinetic Mixing: A Mechanistic Investigation
Gas Permeation in Polydimethylsiloxane In Situ Monitoring by Silicon Pressure Sensors
Section 8: NEMS/MEMS for Bio-Applications II
Metallic Nanoparticles and Nanostructures for Bio-Applications
Analysis of Ionic Transport Interaction between Soft Smart Hydrogel and Solution in BioMEMS Channel
Transport of Water and Particles in Microfluidics Devices Lithographically Fabricated Using Proton Beam Writing (PBW)
Enabling Low Temperature Copper Bonding with an Organic Monolayer
Section 9: Cells Manipulation
Modeling of Cell Motion in Micro-Scale Hydrodynamic-Electrical Field
Modeling of Performance of Single Elastic Capsule in Time-Dependent Two-Dimensional Microchannel Flow
Section 10: MEMS Sensor & Energy Harvesting
Micromachined Pressure Sensors on Optical Fiber Tip
High Accuracy Pressure Sensor Based on Optical MEMS Technology
Use of Micro Synthetic Jet Actuators for Boundary Layer Flow Control
Supernatant Decanting on a Centrifugal Platform
A Wideband Electromagnetic Energy Harvester for Random Vibration Sources
Section 11: Nano-Fabrication
Nano-Photonic & Electronic Structures Pattern and Fabrication
Manufacturing Issues and Considerations in Thermal Bonding of Polymer Based Lab-on-a-Chip
Design and Fabrication of Novel Compliant Electrostatically Actuated Microvalves
Fabrication of a Microfluidic Device with Insulated Electrodes on Top and Bottom Sides of the Channel
Addenda Section
Bandstop Filters with Comb-Like Electromagnetic Bandgap Structures on CPW Stubs
An On-Chip Micro-Droplet Optical Filter Using Evanescent Wave Coupling
Numerical Simulation of Stretchable and Foldable Silicon Integrated Circuits
Section 13: Posters
Design and Analysis of Micromixers on a Centrifugal Platform
A Pendulum-Like Structure for Design of Oscillators
Design and Characterization of a Fourier Transform Micro-Spectrometer
Microstructure and Magnetic Properties of Rapidly Solidified Ni2(Mn,Fe)Ga Heusler Alloys
Separation and Manipulation of Particles Using Traveling Wave Dielectrophoretic Force
Performance Characterization of a Piezoelectric Micro SJA
A Novel Piezoelectric Valveless Micropump with an Integrated Diffuser/Nozzle Bulge Piece Design
Characterization and Optimization of Seals-Off for Very Low Pressure Sensors (VLPS) Fabricated by CMOS MEMS Process
Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage
Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging
Materials Design and Analysis of Low-Power MEMS Microspeaker Using Magnetic Actuation Technology
Prediction of Burr Formation in Fabricating MEMS Components by Micro End Milling
Parametric Study of Hot Embossing on Micro-Holes
Design and Fabrication of a MEMS-Based Gas Sensor
Fabrication of Reliable RF MEMS Switches in CPW Configuration
Exploring the Innovational Potential of Biomimetics for Novel 3D MEMS
Compatibility Study of Diamond-Like Nanocomposite Thin Films with Hydrazine Propellant for MEMS Microthruster
Parametric Study of Femtosecond Pulses Laser Hole Drilling of Silicon Wafer
Piezoeletric Micropump for Drug Delivery System Fabricated Using Two Optical Masks
Hybrid Simulation Approach on MEMS Piezoresistive Microcantilever Sensor for Biosensing Applications
Fabrication of Glucose Sensitive Actuator for DDS Micro Valve
Chain Length Dependence of SAMs-Assisted Copper Thermocompression Bonding
Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees
Kinetic Analysis of UV-Curable Epoxy Resins for Micromachining Applications
Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
Characteristics of Biodegradable Implantable Drug Delivery System with Micro-Porous Structure
Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor
Tunable Optical Filter by Thermal Effect Based on MEMS Technology
Thermal Management and Alignment Strategies in MEMS Tunable Laser Packaging
UV-Visible Spectra Character of Larger Diameter of Gold Nanoparticles (AuNPs)
Numerical Modeling of Spiral Micro-Mixers
A Liquid Optical Tip via Control of Flow Rate
Section 14: Post Submission
In/Ex-situ Detection of HBV DNA Using Dynamic Microcantilever
Process Characterization of Wet Etching for High Aspect Ratio Microneedles Development
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