Fabrication engineering at the micro- and nanoscale
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Bibliographic Information
Fabrication engineering at the micro- and nanoscale
（The Oxford series in electrical and computer engineering）
Oxford University Press, 2008
3rd ed
- : pbk
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Note
Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed
Includes bibliographical references and index
HTTP:URL=http://www.loc.gov/catdir/toc/ecip0714/2007013450.html Information=Table of contents only
