Fundamental principles of engineering nanometrology

Author(s)

• Leach, Richard

Bibliographic Information

Fundamental principles of engineering nanometrology

by Richard K. Leach

（Micro & nano technologies）

William Andrew / Elsevier, 2010

Note

Includes bibliographical references and index

Details

• NCID: BB00149515
• ISBN:
  • 9780080964546
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam
• Pages/Volumes: xxvi, 321 p.
• Size: 25 cm
• Classification:
  • DC22 : 620.50287
• Subject Headings:
  • LCSH : Nanotechnology
  • LCSH : Microtechnology
  • LCSH : Metrology
• Parent Bibliography ID:
  • BA86475071