Nanometrology
著者
書誌事項
Nanometrology
Society of Manufacturing Engineers, c2009
DVD-ROM
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Summary: Learn detailed information on the two major types of microscopes in use today, which are based on either an energy beam made up of electrons or ions, or a scanning probe with a sharp tip. The energy beam methods may use electrons, such as in an S-E-M (scanning electron microscope), and the T-E-M (transmission electron microscope), or they may use ionized atoms, such as in the F-I-B (focused ion beam). The scanning probes include the S-T-M (scanning tunneling microscopy), and the A-F-M (atomic force microscopy)
