{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BB01255788.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BB01255788#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BB01255788.json"},"dc:title":[{"@value":"Atomic layer epitaxy : Papers presented at the 2nd International Atomic Layer Epitaxy Symposium, Raleigh, NC, USA, June 2-5, 1992"}],"dc:creator":"editor, S. Bedair","dc:publisher":[{"@value":"Elsevier Sequoia"}],"dcterms:extent":"x, 304 p.","cinii:size":"29 cm","dc:language":"eng","dc:date":"1993","cinii:ncid":"BB01255788","cinii:ownerCount":"1","foaf:maker":[{"@type":"foaf:Person","foaf:name":[{"@value":"International Symposium on Atomic Layer Epitaxy(2nd : 1992 : Raleigh, NC, USA)"}]},{"@type":"foaf:Person","foaf:name":[{"@value":"Bedair, S."}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001492","@type":"foaf:Organization","foaf:name":"東北大学 電気通信研究所 図書室","rdfs:seeAlso":{"@id":"http://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BB01255788"}}],"prism:publicationDate":["c1993"],"cinii:note":["Includes index"],"dc:subject":["LCC:QC176.9.M84","DC20:621.381/52"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=Thin+films%2C+Multilayered+--+Technique","dc:title":"Thin films, Multilayered -- Technique"},{"@id":"https://ci.nii.ac.jp/books/search?q=Epitaxy","dc:title":"Epitaxy"},{"@id":"https://ci.nii.ac.jp/books/search?q=Layer+structure+%28Solids%29","dc:title":"Layer structure (Solids)"},{"@id":"https://ci.nii.ac.jp/books/search?q=Surface+chemistry","dc:title":"Surface chemistry"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BA07841083#entity","dc:title":"Thin solid films, v. 225, no. 1-2","@type":"bibo:Book"}],"dcterms:hasPart":[{"@id":"urn:isbn:0444896104"}]}]}