Sixteenth Symposium on Electron, Ion, and Photon Beam Technology , Dallas, Texas, May 26-29, 1981 : Abstracts

Author(s)

• Symposium on Electron, Ion, and Photon Beam Technology (16th : 1981 : Dallas, TX, USA)
• Varnell, G.L.
• Herriott, D.R.

Bibliographic Information

Sixteenth Symposium on Electron, Ion, and Photon Beam Technology , Dallas, Texas, May 26-29, 1981 : Abstracts

[s.n.], [1981]

Note

Symposium chairman: G.L. Varnell

Program chairman: D.R. Herriott

• NCID: BB01266026
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Dallas, TX
• Pages/Volumes: 1 v.
• Size: 28 cm
• Subject Headings:
  • LCSH : Electron beams -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : Photon beams -- Congresses