Sixteenth Symposium on Electron, Ion, and Photon Beam Technology , Dallas, Texas, May 26-29, 1981 : Abstracts

著者

• Symposium on Electron, Ion, and Photon Beam Technology (16th : 1981 : Dallas, TX, USA)
• Varnell, G.L.
• Herriott, D.R.

書誌事項

Sixteenth Symposium on Electron, Ion, and Photon Beam Technology , Dallas, Texas, May 26-29, 1981 : Abstracts

[s.n.], [1981]

注記

Symposium chairman: G.L. Varnell

Program chairman: D.R. Herriott

詳細情報

• NII書誌ID(NCID): BB01266026
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Dallas, TX
• ページ数/冊数: 1 v.
• 大きさ: 28 cm
• 件名:
  • LCSH : Electron beams -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : Photon beams -- Congresses