Micro process engineering : a comprehensive handbook
edited by Volker Hessel ... [et al.]
Wiley-VCH, c2009
Wiley-VCH c2009 Micro process engineering : a comprehensive handbook / edited by Volker Hessel ... [et al.] v. 3
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Wiley-VCH c2009 Micro process engineering : a comprehensive handbook / edited by Volker Hessel ... [et al.] v. 2
Wiley-VCH c2009 Micro process engineering : a comprehensive handbook / edited by Volker Hessel ... [et al.] v. 1