Cathodic arcs : from fractal spots to energetic condensation
著者
書誌事項
Cathodic arcs : from fractal spots to energetic condensation
（Springer series on atomic, optical, and plasma physics, 50）
Springer, c2008
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Cathodic arcs are among the longest studied yet least understood objects in science. Plasma-generating, tiny spots appear on the cathode; they are highly dynamic and hard to control. With an approach emphasizing the fractal character of cathode spots, strongly fluctuating plasma properties are described such as the presence of multiply charged ions that move with supersonic velocity. Richly illustrated, the book also deals with practical issues, such as arc source construction, macroparticle removal, and the synthesis of dense, well adherent coatings. The book spans a bridge from plasma physics to coatings technology based on energetic condensation, appealing to scientists, practitioners and graduate students alike.
目次
A Brief History of Cathodic Arc Coating.- The Physics of Cathode Processes.- The Interelectrode Plasma.- Cathodic Arc Sources.- Macroparticles.- Macroparticle Filters.- Film Deposition by Energetic Condensation.- Reactive Deposition.- Some Applications of Cathodic Arc Coatings.
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