Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.

Author(s)

• Vengallatore, Srikar
• Bagdahn, Jörg
• Sheppard, Norman F., Jr.
• Spearing, S. Mark
• Materials Research Society. Meeting

Bibliographic Information

Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.

editors, Srikar Vengallatone ... [et al.]

（Materials Research Society symposium proceedings, v. 1139）

Materials Research Society, c2009

Note

Other editors: Jörg Bagdahn, Norman F. Sheppard Jr., S. Mark Spearing

Includes bibliographical references and indexes

Details

• NCID: BB02089094
• ISBN:
  • 9781605111117
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 247 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775