Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.

著者

• Vengallatore, Srikar
• Bagdahn, Jörg
• Sheppard, Norman F., Jr.
• Spearing, S. Mark
• Materials Research Society. Meeting

書誌事項

Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.

editors, Srikar Vengallatone ... [et al.]

（Materials Research Society symposium proceedings, v. 1139）

Materials Research Society, c2009

注記

Other editors: Jörg Bagdahn, Norman F. Sheppard Jr., S. Mark Spearing

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BB02089094
• ISBN:
  • 9781605111117
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: xi, 247 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775