Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A.
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Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 1156）
Materials Research Society, c2009
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"..., 'Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009," held April 14-17 at the 2009 MRS Spring Meeting in San Francisco, California, ..."--Pref.
Includes bibliographical references and indexes
