Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
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Bibliographic Information
Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 1157）
Materials Research Society, c2010
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Other editors: C. Fred Higgs III, Chad S. Korach, Subramanian Balakumar
Includes bibliographical references and indexes
"..., 'Science and technology of chemical mechanical planarization (CMP),' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.
