Artificially induced grain alignment in thin films : symposium held December 2-3, 2008, Boston, Massachusetts, U.S.A.
著者
書誌事項
Artificially induced grain alignment in thin films : symposium held December 2-3, 2008, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 1150）
Materials Research Society, c2009
- タイトル別名
-
Artificially induced grain alignment in thin films
大学図書館所蔵 全2件
注記
Other editors: Ruben Hühne, Seung-Hyun Moon, Robert Hammond
"'Artificially induced grain alignment in thin films' held December 2-3 at the 2008 MRS Fall Meeting in Boston, Massachusetts, ..." -- Pref.
Includes bibliographical references and indexes
内容説明・目次
内容説明
Thin-film growth is a very old art and an established scientific field in materials science. For decades, growth of monocrystal-like films has been practiced by making use of epitaxy on monocrystalline substrates. In the quest for greater control of materials, the next level of achievement will be to grow well-oriented thin films on arbitrary substrates, i.e., without the need for monocrystalline substrates. That is the goal of artificially inducing grain alignment in thin films. Texturing methods show significant promise in fabricating technologically attractive grain-aligned films. However, over the last three decades a variety of methods for grain alignment have been demonstrated with varying degrees of success. The focus of this book is on physical vapor deposition methods for growth of inorganic thin films, with special attention paid to ion beam assisted deposition (IBAD) texturing. Topics include: milestones in IBAD texturing; IBAD texturing; IBAD long-length application and texturing by other techniques.
目次
- Part I. Milestones in IBAD Texturing
- Part II. IBAD Texturing
- Part III. IBAD Long Length Application
- Part IV. Texturing by Other Techniques
- Author index
- Subject index.
「Nielsen BookData」 より