Nanofabrication : principles, capabilities and limits
著者
書誌事項
Nanofabrication : principles, capabilities and limits
Springer, c2008
- : hbk
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.
目次
Nanofabrication by Photons.- Nanofabrication by Charged Beams.- Nanofabrication by Scanning Probes.- Nanofabrication by Replication.- Nanoscale Pattern Transfer.- Indirect Nanofabrication.- Nanofabrication by Self-Assembly.
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