41st R3-Nordic Symposium : Cleanroom technology, contamination control and cleaning : Dipoli, Espoo, Finland, May 25-26, 2010

Author(s)

• R3-Nordic Symposium
• Valtion teknillinen tutkimuskeskus
• Wirtanen, Gun
• Satu, Salo
• Nordic Association for Contamination Control

Bibliographic Information

41st R3-Nordic Symposium : Cleanroom technology, contamination control and cleaning : Dipoli, Espoo, Finland, May 25-26, 2010

edited by Gun Wirtanen & Satu Salo

（VTT Symposium, 266）

VTT, c2010

Note

Includes bibliographical references

Details

• NCID: BB04600077
• ISBN:
  • 9789513875954
• Country Code: fi
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Helsinki], Finland
• Pages/Volumes: 223 p.
• Size: 25 cm
• Subject Headings:
  • LCSH : Clean rooms -- Congresses
• Parent Bibliography ID:
  • BA01441785
• Link:
  • www.vtt.fi/inf/pdf/symposiums/2010/S266.pdf