Silicon science and advanced micro-device engineering

Author(s)

Bibliographic Information

Silicon science and advanced micro-device engineering

edited by Osamu Hanaizumi and Masafumi Unno

（Key engineering materials, v. 459）

Trans Tech Pub., c2011

  • I

Available at  / 2 libraries

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Note

Selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Mico-Device Engineering (ISSS & AMDE 2009)

Includes bibliographical references and indexes

Related Books： 1-1 of 1

Details

  • NCID
    BB05028096
  • ISBN
    • 9780878492176
  • Country Code
    sz
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Zuerich
  • Pages/Volumes
    xii, 282 p.
  • Size
    25 cm
  • Parent Bibliography ID
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