Silicon science and advanced micro-device engineering
著者
書誌事項
Silicon science and advanced micro-device engineering
（Key engineering materials, v. 459）
Trans Tech Pub., c2011
- I
大学図書館所蔵 全2件
注記
Selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Mico-Device Engineering (ISSS & AMDE 2009)
Includes bibliographical references and indexes