Ultra-thin chip technology and applications
著者
書誌事項
Ultra-thin chip technology and applications
Springer, c2011
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内容説明・目次
内容説明
Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.
目次
- Fabrication technologies for ultra-thin chips.- Post-processing techniques and issues.- Properties of ultra-thin chips
- Applications.
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