Computational lithography

Author(s)

• Ma, Xu
• Arce, Gonzalo R.

Bibliographic Information

Computational lithography

Xu Ma and Gonzalo R. Arce

（Wiley series in pure and applied optics）

Wiley, c2010

• cloth

Note

Includes bibliographical references (p. 217-222) and index

Details

• NCID: BB05567931
• ISBN:
  • 9780470596975
• LCCN: 2009049250
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Hoboken, N.J.
• Pages/Volumes: xii, 226 p.
• Size: 24 cm
• Classification:
  • LCC : TK7872.M3
  • DC22 : 621.3815/31
• Subject Headings:
  • LCSH : Microlithography -- Mathematics
  • LCSH : Integrated circuits -- Design and construction -- Mathematics
  • LCSH : Photolithography -- Mathematics
  • LCSH : Semiconductors -- Etching -- Mathematics
  • LCSH : Resolution (Optics)
• Parent Bibliography ID:
  • BA00348875