2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011
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Bibliographic Information
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011
IEEE, c2011
- [v. 1] pages 1 - 691
- [v. 2] pages 692 - 1385
- Other Title
-
CFP11MEM-PRT
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[v. 1] pages 1 - 691549:I21:2011-11011581913,
[v. 2] pages 692 - 1385549:I21:2011-21011581921 -
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"IEEE catalog number: CFP11MEM-PRT."
