Introduction to microsystem design

Author(s)

• Schomburg, Werner Karl

Bibliographic Information

Introduction to microsystem design

Werner Karl Schomburg

（RWTH edition）

Springer, c2011

Note

Includes bibliographical references (p. 311-314) and index

Details

• NCID: BB06467342
• ISBN:
  • 9783642194887
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin
• Pages/Volumes: xxi, 319 p.
• Size: 25 cm
• Classification:
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Design and construction
  • LCSH : Microelectronics -- Design
• Parent Bibliography ID:
  • BA83864725