NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore
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書誌事項
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore
（Advanced materials research, v. 254）
Trans Tech Publications, c2011
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注記
Includes bibliographical references and indexes
内容説明・目次
内容説明
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic.
目次
Preface
Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors
Thick-Film Deposition of High-Viscous Liquid Photopolymer
Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application
Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever
Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure
Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
A Static Micromixer Inspired from Fractal-Like Natural Flow Systems
AlN Actuator for Tunable RFMEMS Capacitor
GEMS: A MEMS-Based Way for the Innervation of Materials
On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems
Design Consideration of Membrane Structure for Thermal Actuated Micropump
Developing High Sensitivity Biomass Sensor Using Lame Mode Square Resonator
Fabrication of a Peltier Device Based on InSb and SbTe Thin Films
Gapfill Study of Polyimides for MEMS Applications
A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film Transistor
Wireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications
Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator
FBAR Resonators with Sufficient High Q for RF Filter Implementation
Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators
Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis
Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement
Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator
Lead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications
Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants
Tagging for Capsule Endoscopy Localization
The Negative /2 Phase Shift of Total Reflect Light
High Topography Polyimide CMP Process
Hydridosilane Modification of Metals: An Exploratory Study
Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor
Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid Film
A New Peltier Device with a Coaxial Thermocouple
A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device
Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography
Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches
Double-Step Plasma Etching for SiO2 Microcantilever Release
Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators
Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide
Study of Dry and Wet Oxide Etching for MOSFET-Based MEMS Devices
Oscillating Micromixers on a Compact Disc
Robust Sequential Flow Controls on the Centrifugal Platform
Fabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide Films
Effect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin Films
Fabrication of MEMS Based Microspeaker Using Bulk Micromachining Technique
Simulation Study of Side-by-Side Spiral Coil Design for Micromagnetometer
Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc
Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier Device
Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering
On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded Chips
A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab
A New Robust Four Degree-of-Freedom Gyroscope Design
Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes
Investigation of Rhabdomyosarcoma Cell Electrofusion
Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps
Micro-Bubble Generation Using Continuous-Wave Laser
Photocatalytic Microreactor Using Monochromatic Visible Light
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