Contamination-free manufacturing for semiconductors and other precision products

Author(s)

• Donovan, R. P.

Bibliographic Information

Contamination-free manufacturing for semiconductors and other precision products

edited by Robert P. Donovan

Marcel Dekker, c2001

Note

Includes bibliographical references and index

Details

• NCID: BB06538702
• ISBN:
  • 0824703804
• LCCN: 2001028403
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: x, 448 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Semiconductors -- Defects