{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BB07670421.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BB07670421#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BB07670421.json"},"dc:title":[{"@value":"はじめての半導体ドライエッチング技術"},{"@value":"ハジメテ ノ ハンドウタイ ドライ エッチング ギジュツ","@language":"ja-hrkt"}],"dcterms:alternative":["半導体ドライエッチング技術 : はじめての"],"dc:creator":"野尻一男著","dc:publisher":[{"@value":"技術評論社"}],"dcterms:extent":"viii, 162p","cinii:size":"21cm","dc:language":"jpn","dc:date":"2012","cinii:ncid":"BB07670421","cinii:ownerCount":"71","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA17578129#entity","@type":"foaf:Person","foaf:name":[{"@value":"野尻, 一男"},{"@value":"ノジリ, カズオ","@language":"ja-hrkt"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001109","@type":"foaf:Organization","foaf:name":"北海道大学 大学院工学研究科・工学部図書室","rdfs:seeAlso":{"@id":"https://opac.lib.hokudai.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001299","@type":"foaf:Organization","foaf:name":"室蘭工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://mcatalog.lib.muroran-it.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001346","@type":"foaf:Organization","foaf:name":"弘前大学 附属図書館","rdfs:seeAlso":{"@id":"http://opc.ul.hirosaki-u.ac.jp/opc/recordID/catalog.bib/BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001368","@type":"foaf:Organization","foaf:name":"岩手大学 図書館","rdfs:seeAlso":{"@id":"http://zosho.lib.iwate-u.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001415","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館 工学分館","rdfs:seeAlso":{"@id":"https://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001379","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館","rdfs:seeAlso":{"@id":"http://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001528","@type":"foaf:Organization","foaf:name":"秋田大学 附属図書館","rdfs:seeAlso":{"@id":"https://www.lib.akita-u.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001696","@type":"foaf:Organization","foaf:name":"宇都宮大学 附属図書館 陽東分館","rdfs:seeAlso":{"@id":"https://opac.lib.utsunomiya-u.ac.jp/opac/search?s_ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001732","@type":"foaf:Organization","foaf:name":"群馬大学 総合情報メディアセンター 理工学図書館","rdfs:seeAlso":{"@id":"http://opac.lib.gunma-u.ac.jp/opc/recordID/catalog.bib/BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA011791","@type":"foaf:Organization","foaf:name":"東京大学 工学部・工学系研究科","rdfs:seeAlso":{"@id":"https://opac.dl.itc.u-tokyo.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA001914","@type":"foaf:Organization","foaf:name":"東京農工大学 小金井図書館","rdfs:seeAlso":{"@id":"https://libwebservice.biblio.tuat.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA000106","@type":"foaf:Organization","foaf:name":"東京科学大学 大岡山図書館","rdfs:seeAlso":{"@id":"https://topics.libra.titech.ac.jp/recordID/catalog.bib/BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA002101","@type":"foaf:Organization","foaf:name":"長岡技術科学大学 附属図書館","rdfs:seeAlso":{"@id":"https://libopac-u.nagaokaut.ac.jp/webopac00/ctlsrh.do?ncid=[NCID]"}},{"@id":"https://ci.nii.ac.jp/library/FA002236","@type":"foaf:Organization","foaf:name":"福井大学 附属図書館","rdfs:seeAlso":{"@id":"https://karin.flib.u-fukui.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA002407","@type":"foaf:Organization","foaf:name":"名古屋大学 附属図書館","rdfs:seeAlso":{"@id":"https://m-opac.nul.nagoya-u.ac.jp/iwjs0023opc/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421&initFlg=_RESULT_SET_NOTBIB"}},{"@id":"https://ci.nii.ac.jp/library/FA002553","@type":"foaf:Organization","foaf:name":"豊橋技術科学大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.lib.tut.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA002611","@type":"foaf:Organization","foaf:name":"京都大学 附属図書館","rdfs:seeAlso":{"@id":"https://kuline.kulib.kyoto-u.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA022120","@type":"foaf:Organization","foaf:name":"京都大学 桂図書館","rdfs:seeAlso":{"@id":"https://kuline.kulib.kyoto-u.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA002826","@type":"foaf:Organization","foaf:name":"京都教育大学 附属図書館","rdfs:seeAlso":{"@id":"http://tosho2.kyokyo-u.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA002870","@type":"foaf:Organization","foaf:name":"大阪大学 附属図書館 理工学図書館","rdfs:seeAlso":{"@id":"https://opac.library.osaka-u.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA003035","@type":"foaf:Organization","foaf:name":"神戸大学 附属図書館 自然科学系図書館","rdfs:seeAlso":{"@id":"https://op.lib.kobe-u.ac.jp/opac/opac_openurl/?rfe_dat=ncid/BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA003308","@type":"foaf:Organization","foaf:name":"山口大学 図書館 工学部図書館","rdfs:seeAlso":{"@id":"https://opac.lib.yamaguchi-u.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA003374","@type":"foaf:Organization","foaf:name":"愛媛大学 図書館","rdfs:seeAlso":{"@id":"https://opac1.lib.ehime-u.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA003545","@type":"foaf:Organization","foaf:name":"熊本大学 附属図書館","rdfs:seeAlso":{"@id":"https://opserv.lib.kumamoto-u.ac.jp/opc/xc/search?keys=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA014053","@type":"foaf:Organization","foaf:name":"東京都立大学 図書館 日野館","rdfs:seeAlso":{"@id":"https://opactmu.lib.tmu.ac.jp/iwjs0013opc/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA003760","@type":"foaf:Organization","foaf:name":"東京都立大学 図書館","rdfs:seeAlso":{"@id":"https://opactmu.lib.tmu.ac.jp/iwjs0013opc/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA004490","@type":"foaf:Organization","foaf:name":"東北工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.tohtech.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA004876","@type":"foaf:Organization","foaf:name":"千葉工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac2.lib.chibatech.ac.jp/"}},{"@id":"https://ci.nii.ac.jp/library/FA005234","@type":"foaf:Organization","foaf:name":"工学院大学 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA005245","@type":"foaf:Organization","foaf:name":"工学院大学 八王子図書館"},{"@id":"https://ci.nii.ac.jp/library/FA005314","@type":"foaf:Organization","foaf:name":"芝浦工業大学 豊洲図書館","rdfs:seeAlso":{"@id":"https://library.shibaura-it.ac.jp/cgi-bin/search.cgi?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA005493","@type":"foaf:Organization","foaf:name":"成城大学 図書館","rdfs:seeAlso":{"@id":"https://opac.lib.seijo.ac.jp/opac/opac_openurl?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006077","@type":"foaf:Organization","foaf:name":"東京電機大学 総合メディアセンター 鳩山センター"},{"@id":"https://ci.nii.ac.jp/library/FA006066","@type":"foaf:Organization","foaf:name":"東京電機大学 総合メディアセンター 千住センター"},{"@id":"https://ci.nii.ac.jp/library/FA006113","@type":"foaf:Organization","foaf:name":"東京理科大学 野田図書館","rdfs:seeAlso":{"@id":"https://jimkilisop1.admin.tus.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA025195","@type":"foaf:Organization","foaf:name":"東京理科大学 葛飾図書館","rdfs:seeAlso":{"@id":"https://jimkilisop1.admin.tus.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006102","@type":"foaf:Organization","foaf:name":"東京理科大学 神楽坂図書館","rdfs:seeAlso":{"@id":"https://jimkilisop1.admin.tus.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006204","@type":"foaf:Organization","foaf:name":"東洋大学 附属図書館 川越図書館","rdfs:seeAlso":{"@id":"https://triton.lib.toyo.ac.jp/gate?module=search&path=search.do&method=search&searchForm.library=true&searchForm.orderNumber=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006576","@type":"foaf:Organization","foaf:name":"法政大学 小金井図書館","rdfs:seeAlso":{"@id":"https://opac.lib.hosei.ac.jp/opac/opac_openurl?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006678","@type":"foaf:Organization","foaf:name":"明治大学 図書館","rdfs:seeAlso":{"@id":"https://opac2018.lib.meiji.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006849","@type":"foaf:Organization","foaf:name":"神奈川大学 図書館","rdfs:seeAlso":{"@id":"http://opac.kanagawa-u.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA006893","@type":"foaf:Organization","foaf:name":"湘南工科大学 附属図書館","rdfs:seeAlso":{"@id":"https://lib.shonan-it.ac.jp/CARIN/CARINOPACLINK.HTM?OAL=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA007251","@type":"foaf:Organization","foaf:name":"愛知工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.aitech.ac.jp/iwjs0007opc/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA007295","@type":"foaf:Organization","foaf:name":"大同大学 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA007342","@type":"foaf:Organization","foaf:name":"中部大学 附属三浦記念図書館","rdfs:seeAlso":{"@id":"https://elib.bliss.chubu.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA028863","@type":"foaf:Organization","foaf:name":"京都先端科学大学 京都太秦キャンパス図書館","rdfs:seeAlso":{"@id":"https://opackuas.azurewebsites.net/Main/Opensearch?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA012218","@type":"foaf:Organization","foaf:name":"京都産業大学 図書館","rdfs:seeAlso":{"@id":"https://ksucat2.kyoto-su.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA007670","@type":"foaf:Organization","foaf:name":"同志社大学 図書館","rdfs:seeAlso":{"@id":"https://doors.doshisha.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA007739","@type":"foaf:Organization","foaf:name":"立命館大学 図書館","rdfs:seeAlso":{"@id":"http://runners.ritsumei.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA007852","@type":"foaf:Organization","foaf:name":"大阪産業大学 綜合図書館","rdfs:seeAlso":{"@id":"https://library.cnt.osaka-sandai.ac.jp/gate?module=search&path=search&method=search&searchForm.library=true&searchForm.orderNumber=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA008050","@type":"foaf:Organization","foaf:name":"近畿大学 工学部図書館","rdfs:seeAlso":{"@id":"https://opac.clib.kindai.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA015577","@type":"foaf:Organization","foaf:name":"近畿大学 生物理工学部図書館","rdfs:seeAlso":{"@id":"https://opac.clib.kindai.ac.jp/iwjs0014opc/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA008516","@type":"foaf:Organization","foaf:name":"岡山理科大学 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA008607","@type":"foaf:Organization","foaf:name":"広島工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://libwww.cc.it-hiroshima.ac.jp/intrasite/CARINOPACLINK.htm?ONI=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA008913","@type":"foaf:Organization","foaf:name":"福岡大学 図書館","rdfs:seeAlso":{"@id":"https://fuopac.lib.fukuoka-u.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA009166","@type":"foaf:Organization","foaf:name":"放送大学 附属図書館","rdfs:seeAlso":{"@id":"https://libinfo.ouj.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA009202","@type":"foaf:Organization","foaf:name":"宇宙航空研究開発機構 宇宙科学研究所 図書室","rdfs:seeAlso":{"@id":"https://opac.std.cloud.iliswave.jp/iwjs0008opc/cattab.do?sp_srh_flg=true&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA009326","@type":"foaf:Organization","foaf:name":"防衛省防衛大学校 総合情報図書館"},{"@id":"https://ci.nii.ac.jp/library/FA014246","@type":"foaf:Organization","foaf:name":"富山県立大学 附属図書館 射水館","rdfs:seeAlso":{"@id":"https://lib.pu-toyama.ac.jp/opac/opac_openurl/?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA014461","@type":"foaf:Organization","foaf:name":"長岡工業高等専門学校 図書館","rdfs:seeAlso":{"@id":"https://libopac-c.kosen-k.go.jp/webopac17/ctlsrh.do?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA01460X","@type":"foaf:Organization","foaf:name":"東京工科大学 メディアセンター","rdfs:seeAlso":{"@id":"http://library.teu.ac.jp/mylimedio/search/search.do?target=local&mode=comp&annex=all&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA014745","@type":"foaf:Organization","foaf:name":"岡山県立大学 附属図書館","rdfs:seeAlso":{"@id":"http://opac.lib.oka-pu.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA015249","@type":"foaf:Organization","foaf:name":"海上保安大学校 図書館","rdfs:seeAlso":{"@id":"https://opac.library.academy.kaiho.mlit.go.jp/opac4/opac/ncid_search?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA015271","@type":"foaf:Organization","foaf:name":"東京工業高等専門学校 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA015431","@type":"foaf:Organization","foaf:name":"宇部工業高等専門学校 図書館","rdfs:seeAlso":{"@id":"https://libopac-c.kosen-k.go.jp/webopac38/ctlsrh.do?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA016682","@type":"foaf:Organization","foaf:name":"長野工業高等専門学校 図書館","rdfs:seeAlso":{"@id":"https://libopac-c.kosen-k.go.jp/webopac22/ctlsrh.do?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA016751","@type":"foaf:Organization","foaf:name":"舞鶴工業高等専門学校 図書館","rdfs:seeAlso":{"@id":"https://libopac-c.kosen-k.go.jp/webopac28/ctlsrh.do?ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA020056","@type":"foaf:Organization","foaf:name":"秋田県立大学 附属図書館 本荘キャンパス図書館"},{"@id":"https://ci.nii.ac.jp/library/FA019534","@type":"foaf:Organization","foaf:name":"和歌山工業高等専門学校 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA020169","@type":"foaf:Organization","foaf:name":"北九州学術研究都市学術情報センター","rdfs:seeAlso":{"@id":"http://lib.hibikino.ne.jp/webopac/ufirdi.do?ufi_target=ctlsrh&listcnt=20&maxcnt=1000&ncid=BB07670421"}},{"@id":"https://ci.nii.ac.jp/library/FA020191","@type":"foaf:Organization","foaf:name":"ものつくり大学 図書館・メディア情報センター","rdfs:seeAlso":{"@id":"https://opac-lib.iot.ac.jp/gate?module=search&path=search.do&method=search&searchForm.library=true&searchForm.orderNumber=BB07670421"}}],"prism:publicationDate":["2012.1"],"cinii:note":["参考文献: 各章末"],"dc:subject":["NDC8:549.8","NDC9:549.8"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BA89795385#entity","dc:title":"現場の即戦力","@type":"bibo:Book"}],"dcterms:hasPart":[{"@id":"urn:isbn:9784774149400"}]}]}