Semiconductor-on-insulator materials for nanoelectronics applications
著者
書誌事項
Semiconductor-on-insulator materials for nanoelectronics applications
（Engineering materials）
Springer, c2011
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
"Semiconductor-On-Insulator Materials for NanoElectronics Applications" is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications" is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
目次
New semiconductor-on-insulator materials.- Physics of modern SemOI devices.- Diagnostics of the SOI devices.- Sensors and MEMS on SOI.
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