Silicon science and advanced micro-device engineering II/ edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura
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Silicon science and advanced micro-device engineering II/ edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura
（Key engineering materials, v. 497）
Trans Tech Pub., c2012
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Selected, peer reviewed papers from the 6th International Symposium on Silicon Science and the 2nd International Conference on Advanced Mico-Device Engineering (ISSS & AMDE 2010)
Includes bibliographical references and indexes