MEMS/NEMS nano technology : selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano Technology and 2th [sic] International Conference of Chinese Society of Micro-Nano Technology, October 22-24, 2010, Xi'an, China

著者

    • Wang, Xiaohao

書誌事項

MEMS/NEMS nano technology : selected, peer reviewed papers from the 12th Annual Conference of the Chinese Society of Micro-Nano Technology and 2th [sic] International Conference of Chinese Society of Micro-Nano Technology, October 22-24, 2010, Xi'an, China

edited by Xiaohao Wang

Trans Tech Publications, cop. 2011

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro-/Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS/NENS and Applications, Nano-Material Research/Nanotubes/Nanowire Devices, Micropower Technology, Theories in Micro-/Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology.

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