Microfabrication for microfluidics
著者
書誌事項
Microfabrication for microfluidics
（Integrated microsystems series）
Artech House, c2010
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Microfluidics is an emerging field involving fluid flow and devices in microscale and nanoscale. Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for the professional's reference shelf. Practitioners find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons. To complement the book, a companion website will be periodically updated with the latest details on the subject, such as etch rates, mechanical properties, optical properties, and feature resolution for the different materials used in microfluidic devices.
目次
Introduction. Functional Structures and Implementation Examples. Materials for Microfluidic Devices. Fabrication Methods. Fluid Ports and Macro-to-Micro Interfacing. Signal Interfacing and Integration.
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