Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009

Author(s)

    • International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
    • Kittler, M.
    • Richter, H.

Bibliographic Information

Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009

edited by M. Kittler and H. Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 156-158）

Trans Tech Pub., c2010

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Note

Includes bibliographical references and index

Related Books： 1-1 of 1

Details

  • NCID
    BB08789066
  • ISBN
    • 9783908451747
  • Country Code
    sz
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Stafa-Zurich, Switzerland
  • Pages/Volumes
    xiv, 592 p.
  • Size
    25 cm
  • Parent Bibliography ID
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