Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Kittler, M.
• Richter, H.

書誌事項

Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009

edited by M. Kittler and H. Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 156-158）

Trans Tech Pub., c2010

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BB08789066
• ISBN:
  • 9783908451747
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Stafa-Zurich, Switzerland
• ページ数/冊数: xiv, 592 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800