Porous silicon in practice : preparation, characterization and applications

著者

    • Sailor, Michael J

書誌事項

Porous silicon in practice : preparation, characterization and applications

Michael J. Sailor

Wiley-VCH, c2012

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

By means of electrochemical treatment, crystalline silicon can be permeated with tiny, nanostructured pores that entirely change the characteristics and properties of the material. One prominent example of this can be seen in the interaction of porous silicon with living cells, which can be totally unwilling to settle on smooth silicon surfaces but readily adhere to porous silicon, giving rise to great hopes for such future applications as programmable drug delivery or advanced, braincontrolled prosthetics. Porous silicon research is active in the fields of sensors, tissue engineering, medical therapeutics and diagnostics, photovoltaics, rechargeable batteries, energetic materials, photonics, and MEMS (Micro Electro Mechanical Systems). Written by an outstanding, well-recognized expert in the field, this book provides detailed, step-by-step instructions to prepare and characterize the major types of porous silicon. It is intended for those new to the fi eld. Sampling of topics covered: * Principles of Etching Porous Silicon * Etch Cell Construction and Considerations * Photonic Crystals, Microcavities, and Bragg Stacks Etched in Silicon * Preparation of Free-standing Films and Particles of Porous Silicon * Preparation of Photoluminescent Nanoparticles from Porous Silicon * Preparation of Silicon Nanowires by Electrochemical Etch of Silicon * Surface Modifi cation Chemistry and Biochemistry * Measurement of Optical Properties * Measurement of Pore Size, Porosity, Thickness, Surface Area The whole is backed by a generous use of color photographs to illustrate the described procedures in detail, plus a bibliography of further literature pertinent to a wide range of application fi elds. For materials scientists, chemists, physicists, optical physicists, biomaterials scientists, neurobiologists, bioengineers, and graduate students in those fields, as well as those working in the semiconductor industry.

目次

Preface FUNDAMENTALS OF POROUS SILICON PREPARATION Introduction Chemical Reactions Governing the Dissolution of Silicon Experimental Set-up and Terminology for Electrochemical Etching of Porous Silicon Electrochemical Reactions in the Silicon System Density, Porosity, and Pore Size Definitions Mechanisms of Electrochemical Dissolution and Pore Formation Resume of the Properties of Crystalline Silicon Choosing, Characterizing, and Preparing a Silicon Wafer PREPARATION OF MICRO-, MESO-, AND MACRO-POROUS SILICON LAYERS Etch Cell: Materials and Construction Power Supply Other Supplies Safety Precautions and Handling of Waste Preparing HF Electrolyte Solutions Cleaning Wafers Prior to Etching Preparation of Microporous Silicon from a p-Type Wafer Preparation of Mesoporous Silicon from a p++-Type Wafer Preparation of Macroporous, Luminescent Porous Silicon from an n-Type Wafer (Frontside Illumination) Preparation of Macroporous, Luminescent Porous Silicon from an n-Type Wafer (Back Side Illumination) Preparation of Porous Silicon by Stain Etching Preparation of Silicon Nanowire Arrays by Metal-Assisted Etching PREPARATION OF SPATIALLY MODULATED POROUS SILICON LAYERS Time-Programmable Current Source Pore Modulation in the z-Direction: Double Layer Pore Modulation in the z-Direction: Rugate Filter More Complicated Photonic Devices: Bragg Stacks, Microcavities, and Multi-Line Spectral Filters Lateral Pore Gradients (in the x-y Plane) Patterning in the x-y Plane Using Physical or Virtual Masks Other Patterning Methods FREESTANDING POROUS SILICON FILMS AND PARTICLES Freestanding Films of Porous Silicon-"Lift-offs" Micron-Scale Particles of Porous Silicon by Ultrasonication of Lift-off Films Core-Shell (Si/SiO2) Nanoparticles of Luminescent Porous Silicon by Ultrasonication CHARACTERIZATION OF POROUS SILICON Gravimetric Determination of Porosity and Thickness Electron Microscopy and Scanned Probe Imaging Methods Optical Reflectance Measurements Porosity, Pore Size, and Pore Size Distribution by Nitrogen Adsorption Analysis (BET, BJH, and BdB Methods) Measurement of Steady-State Photoluminescence Spectra Time-Resolved Photoluminescence Spectra Infrared Spectroscopy of Porous Silicon CHEMISTRY OF POROUS SILICON Oxide-Forming Reactions of Porous Silicon Biological Implications of the Aqueous Chemistry of Porous Silicon Formation of Silicon-Carbon Bonds Thermal Carbonization Reactions Conjugation of Biomolecules to Modified Porous Silicon Chemical Modification in Tandem with Etching Metallization Reactions of Porous Silicon APPENDIX A1. ETCH CELL ENGINEERING DIAGRAMS AND SCHEMATICS Standard or Small Etch Cell-Complete Standard Etch Cell Top Piece Small Etch Cell Top Piece Etch Cell Base (for Either Standard or Small Etch Cell) Large Etch Cell-Complete Large Etch Cell Top Piece Large Etch Cell Base APPENDIX A2. SAFETY PRECAUTIONS WHEN WORKING WITH HYDROFLUORIC ACID Hydrofluoric Acid Hazards First Aid Measures for HF Contact Note to Physician HF Antidote Gel APPENDIX A3. GAS DOSING CELL ENGINEERING DIAGRAMS AND SCHEMATICS Gas Dosing Cell Top Piece Gas Dosing Cell Middle Piece Gas Dosing Cell Bottom Piece

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