2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, 29 Jaunary - 2 February 2012
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Bibliographic Information
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, 29 Jaunary - 2 February 2012
IEEE, c2011
- [v. 1] pages 1 - 691
- [v. 2] pages 692 - 1375
- Other Title
-
CFP12MEM-PRT
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[v. 1] pages 1 - 691549:I21:2012-11011626155,
[v. 2] pages 692 - 1375549:I21:2012-21011626163 -
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"IEEE catalog number: CFP12MEM-PRT."


