High Purity Silicon 11
著者
書誌事項
High Purity Silicon 11
(ECS transactions, vol.33,
Electrochemical Society, c2010
- タイトル別名
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High Purity Silicon 11 : dielectric and semiconductor materials, devices, and processing
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注記
Includes bibliographical references and index
"The paperes included in this issue of ECS Transactions were originally presented in the symposium "High Purity Silicon 11", held during the 218th meeting of The Electrochemical Society, in Las Vegas, Nevada from October 10 to 15, 2010."-- preface