VLSI technology
著者
書誌事項
VLSI technology
（McGraw-Hill series in electrical engineering, . Electronics and electronic circuits）（McGraw-Hill international editions, . Electronic and electrical engineering seris）
McGraw-Hill, c1988
2nd ed., International ed.
- : [pbk]
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This is a superb state-of-the-art collection of contributed readings, by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
目次
Chapter 1: Crystal Growth and water prepreparationChapter 2: EpitaxyChapter 3: OxidationChapter 4: LithographyChapter 5: Reactive Plasma EtchingChapter 6: Dielectric and Polysilicon Film DepositionChapter 7: Diffusion, Ion ImplementationChapter 8: MetallizationChapter 9: Process SimulationChapter 10: LSI Process IntegrationChapter 11: Analytical TechniquesChapter 12: Assembly techniques and Packaging of VLSI DevicesChapter 13: Yield and Reliability
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