MEMS, bioMEMS and bioelectronics : materials and devices : symposium held November 28-December 2 2011, Boston, Massachusetts, U.S.A.
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MEMS, bioMEMS and bioelectronics : materials and devices : symposium held November 28-December 2 2011, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 1415）
Materials Research Society , Cambridge University Press, 2012
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"Symposium TT, 'Microelectromechanical Systems-Materials and Devices V,' held from November 28-30, 2011 at the 2011 MRS Fall Meeting in Boston, Massachusetts."--Pref
Includes papers from sessions of the 2011 MRS Fall Meeting
Includes bibliographical references and index
