Advances in CMP/polishing technologies for the manufacture of electronic devices
著者
書誌事項
Advances in CMP/polishing technologies for the manufacture of electronic devices
William Andrew : Elsevier, 2012
- : hbk
- タイトル別名
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Advances in CMP polishing technologies
CMP polishing technologies for the manufacture of electronic devices : advances in
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注記
On title page: "William Andrew is an imprint of Elsevier"
Includes bibliographical references and index
