2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, 20-24 Jaunary 2013
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Bibliographic Information
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, 20-24 Jaunary 2013
IEEE, c2013
- [v. 1] pages 1 - 700
- [v. 2] pages 701 - 1210
- Other Title
-
CFP13MEM-PRT
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[v. 1] pages 1 - 700549:I21:2013-11011660584,
[v. 2] pages 701 - 1210549:I21:2013-21011660592 -
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"IEEE catalog number: CFP13MEM-PRT."
