Mechanics and physics of precise vacuum mechanisms
Author(s)
Bibliographic Information
Mechanics and physics of precise vacuum mechanisms
（Fluid mechanics and its applications, v. 91）
Springer, c2010
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Includes bibliographical references
Description and Table of Contents
Description
In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way.
Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision based on magnetic and electric rheology; precise harmonic rotary and not-coaxial nut-screw linear motion vacuum feedthroughs with technical parameters considered the best in the world; elastically deformed vacuum motion feedthroughs without friction couples usage; the computer system of vacuum mechanisms failure predicting.
This English edition incorporates a number of features which should improve its usefulness as a textbook without changing the basic organization or the general philosophy of presentation of the subject matter of the original Russian work.
Experience at the Bauman Moscow State Technical University and other schools shows that the book will be useful to engineering students who wish to prepare for more advanced studies and applications of vacuum science, technology and its applications.
Table of Contents
- Contents
- Preface
- About the Authors
- 1 Using Precise Mechanisms in Modern Vacuum Technological Equipment
- References
- 2 Typical Vacuum Mechanisms
- 2.1 Functions of Vacuum Mechanisms 2.2 Rotary-Motion Feedthroughs
- 2.3 Linear-Motion Feedthrough
- 2.4 Manipulators
- 2.5 Micro Mechanisms
- References
- 3 Friction in Vacuum
- 3.1 Friction Coefficients of Different Materials in Atmosphere and in Vacuum
- 3.2 Dry Friction Laws in Atmosphere and in Vacuum
- 3.3 The Main Factors, which Determine the Surface Coverage at "Dry" Friction
- 3.3.1 Influence of the Residual Pressure and Temperature
- 3.3.2 Influence of the Sliding Velocity and Roughness Geometry
- 3.4 The Theoretical Analysis of Friction in the Different Ranges of Coverage
- 3.4.1 Viscous Component of a Friction Force
- 3.4.2 Capillary Component of a Friction Force
- 3.4.3 Adhesive-Viscous Friction
- 3.4.4 Adhesive Friction
- 3.4.5 Cohesion Friction
- 3.5 The Possibility to Use the Described Method for the Calculation of the Friction Coefficient of Real Surfaces
- 3.6 Exchange of Gases at Friction in Vacuum References
- 4 Matrix Method of the Design of New Mechanisms Structure
- 4.1 The Stages of the Matrix Method of the Mechanisms Generation
- 4.2 The List of the Parameters of Vacuum Mechanisms Which Are Used in Matrix Analysis
- 4.2.1 The First (Highest) Level Parameters
- 4.2.2 The Second Level Parameters
- 4.2.3 The Third Level Parameters
- 4.2.4 The Fourth Level Parameters
- 4.3 Algorithm of the Matrix Method of the Generation of New Mechanisms
- References
- 5 Precision of Vacuum Mechanisms
- 5.1 The Constituents of Errors of Vacuum Mechanisms
- 5.2 The Basic Positions of the Precision Theory of Vacuum Mechanisms
- 5.2.1 Open-Loop-Controlled Drive
- 5.2.2 Completely Loop-Controlled Drive
- 5.3 Determination of the Error Components of Different Origins
- 5.3.1 Calculation of the Kinematic Component of the Error
- 5.3.2 Calculation of the Error from Elastic Deformations
- 5.3.3 Calculation of the Error Caused by the Deformation of theThin-Wall Sealing Elements
- 5.3.4 Calculation of the Positioning Error Caused by the Resistance Forces at Movement
- 5.4 Summarizing the Components of different Types and Forms
- 5.5 Correlation of Total Error of the Mechanisms with Economic Parameters
- References
- 6 Vacuum Mechanisms of Nanoscale Precision
- 6.1 The Principles of Nanometer Precision of Vacuum Mechanisms
- 6.2 Physical Effects Which Are Used for Vacuum Mechanisms of Nanometer Precision Creation
- 6.2.1 Piezo Effect
- 6.2.2 Magnetic and Electric Rheology Effects
- 6.3 Vacuum Drives and Manipulators of Nanoscale Precision
- 6.3.1 Vacuum Piezo Drives
- 6.3.2 Multi-Coordinate Magnetic and Rheology Drives and Manipulators
- References
- 7 Ultrahigh Vacuum Rotary-Motion Feedthroughs
- 7.1 Analysis of Design Variants of Thin-Wall Sealing Elements on Parameter "Manufacturability"
- 7.2 Precision of Harmonic Gear Rotary Feedthroughs
- 7.3 Longevity of Harmonic Gear Rotary Feedthrough
- 7.4 Outgassing Flow of Harmonic Rotary-Motion Feedthrough
- 7.5 Calculation of Hermetic Harmonic Gear Feedthrough
- 7.5.1 Determinationof the Number of Teeth
- 7.5.2 Calculation of Main Sizes of Flexible Gears
- 7.5.3 Calculation of Control Rollers Size of Rigid Gear
- 7.5.4 Calculation of Flexible Gear Geometry, Calculation of Geometry Sizes which Ensure Hermetic Properties of Flexible Gear
- 7.5.5 Calculation of Assurance Factor of Flexible Gear Teeth
- 7.5.6 Calculation of Flexible Gear Wave Generator
- References
- 8 Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
- 8.1 The Hermetic Drive Designs Principles Based on Non-Coaxial Nut-Screw Couples
- 8.2 Geometry of Nut-Screw Coupling of Linear-Motion Hermetic Feedthrough
- 8.3 Kinematic Calculation
- 8.4 Force Calculation of Hermetic Feedthroughs Based on Non-Coaxial Nut-Screw Mechanisms
- 8.5 System Losses and Efficiency Factor of Hermetic Feedthroughs Based on Non-Coaxial Nut-Screw Mechanisms
- 8.6 Analysis of Loading Ability of Planetary Nut-Screw Feedthroughs
- References
- 9 Vacuum
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