Nano-structure and tribological properties of ion-beam modified silicon nitride
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Bibliographic Information
Nano-structure and tribological properties of ion-beam modified silicon nitride
[s.n.], [2006]
- Other Title
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イオンビームで表面改質した窒化ケイ素のナノ構造とトライボロジー特性
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Note
Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2006
Kind of academic degree: 博士(工学)
Date degree granted: 2006-04-28
Report number: 乙第6568号
Diploma number: 論工博第1654号
