Thermal reaction mechanisms of polycrystalline AIN and SiC with XeF[2]

Author(s)

• 渡邊, 守道 ワタナベ, モリミチ

Bibliographic Information

Thermal reaction mechanisms of polycrystalline AIN and SiC with XeF[2]

doctoral dissertation by Morimichi Watanabe

[s.n.], [2004]

Other Title

多結晶窒化アルミニウムおよび炭化珪素とフッ化キセノン(2)の熱反応機構の研究

多結晶窒化アルミニウムおよび炭化珪素とフッ化キセノン(2)の熱反応機構の研究

Note

On t.p. "[2]" is subscript

Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2004

Kind of academic degree: 博士(工学)

Date degree granted: 2004-07-30

Report number: 乙第6373号

Details

• NCID: BB1341101X
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [S.l.]
• Pages/Volumes: 130 p.
• Size: 30 cm