Thermal reaction mechanisms of polycrystalline AIN and SiC with XeF[2]
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Thermal reaction mechanisms of polycrystalline AIN and SiC with XeF[2]
[s.n.], [2004]
- Other Title
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多結晶窒化アルミニウムおよび炭化珪素とフッ化キセノン(2)の熱反応機構の研究
多結晶窒化アルミニウムおよび炭化珪素とフッ化キセノン(2)の熱反応機構の研究
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Note
On t.p. "[2]" is subscript
Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2004
Kind of academic degree: 博士(工学)
Date degree granted: 2004-07-30
Report number: 乙第6373号