Microsystems and nanotechnology

Author(s)

• Zhou, Zhaoying
• Wang, Zhong Lin
• Lin, Liwei

Bibliographic Information

Microsystems and nanotechnology

Zhaoying Zhou, Zhonglin Wang, Liwei Lin, [editors]

Tsinghua University Press , Springer, c2012

• : Tsinghua
• : Springer

Note

"Zhaoying Zhou, Zhonglin Wang, Liwei Lin, editors"--Cover

"With 586 figures, 148 of them in color"

Includes bibliographical references

Details

• NCID: BB13582431
• ISBN:
  • 9787302243076
  • 9783642182921
• LCCN: 2011920981
• Country Code: ch
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Beijing,Heidelberg
• Pages/Volumes: xxii, 1004 p.
• Size: 25 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Nanotechnology