FIB nanostructures
著者
書誌事項
FIB nanostructures
（Lecture notes in nanoscale science and technology / series editors, Zhiming M. Wang ... [et al.], 20）
Springer, c2013
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, nanotubes, nanoneedles, graphene sheets, quantum dots, etc. The main objective of this book is to create a platform for knowledge sharing and dissemination of the latest advances in novel areas of FIB for nanostructures and related materials and devices, and to provide a comprehensive introduction to the field and directions for further research. Chapters written by leading scientists throughout the world create a fundamental bridge between focused ion beam and nanotechnology that is intended to stimulate readers' interest in developing new types of nanostructures for application to semiconductor technology. These applications are increasingly important for the future development of materials science, energy technology, and electronic devices. The book can be recommended for physics, electrical engineering, and materials science departments as a reference on materials science and device design.
目次
Preface
Chapter 1: Focused Ion Beam (FIB) technology for micro and nanoscale fabrications
Chapter 2: Epitaxial ferroelectric nanostructures fabricated by FIB milling
Chapter 3: Low current focused-ion-beam milling for freestanding nanomaterial characterization
Chapter 4: Focused ion beam milling of carbon nanotube yarns and Bucky-papers: Correlating their internal structure with their macro-properties
Chapter 5: Nanoscale electrical contacts grown by Focused-Ion-Beam (FIB) Induced Deposition
Chapter 6: Metal induced crystallization of focused ion beam induced deposition for functional patterned ultrathin nanocarbon
Chapter 7: Deterministic Fabrication of Micro- and Nano-Structures by Focused Ion Beam
Chapter 8: Application of ion beam processes to scanning probe microscopy
Chapter 9: Fabrication of needle-shaped specimens containing sub-surface nanostructures for Electron Tomography
Chapter 10: Fabrication technique of deformation carriers (gratings and speckle patterns) with FIB for micro/nano-scale deformation measurement
Chapter 11: Controlled Quantum Dot Formation on Focused Ion Beam patterned GaAs Substrates
Chapter 12: Development of Functional Metallic Glassy Materials by FIB and Nano-imprint Technologies
Chapter 13: Nanostructured Materials Driven by Dielectrophoresis on Nanoelectrods Patterned by Focused Ion Beam
Chapter 14: Focused Ion Beam Assisted Nano-Scale Processing and Thermoelectrical Characterization
Chapter 15: FIB design for Nanofluidic applications
Chapter 16: FIB Patterning of Stainless Steel for the Development of Nano-Structured Stent Surfaces for Cardiovascular Applications
Chapter 17: Evaluation of damages induced by Ga+ focused ion beam in piezoelectric nanostructures
Chapter 18: Instabilities in Focused Ion Beam-patterned nanostructures
Chapter 19: Nanostructures by mass-separated FIB
Index
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