2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco, California, USA 26-30 Jaunary 2014
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Bibliographic Information
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco, California, USA 26-30 Jaunary 2014
IEEE, c2014
- [v. 1]: pages 1-643
- [v. 2]: pages 644-1292
- Other Title
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CFP14MEM-POD
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[v. 1]: pages 1-643549:I21:2014-11011690185,
[v. 2]: pages 644-1292549:I21:2014-21011690193 -
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"IEEE catalog number: CFP14MEM-POD."